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特種氣體工藝系統(tǒng)是用來處理特殊氣體的一個(gè)系統(tǒng),這里主要介紹下工藝氣體系統(tǒng)及特種氣體工藝系統(tǒng)的組成及以下設(shè)計(jì)方面的要求。
2019-02-25
本文主要對(duì)特種氣體設(shè)備的布置進(jìn)行一些講解,主要包括特氣設(shè)備種類,特氣設(shè)備具體布置方式。
2019-02-22
特種氣體在半導(dǎo)體行業(yè)應(yīng)用比較多,一些用氣量大的工廠需要建立特種氣體站房,特種氣體在分類和設(shè)計(jì)上需要注意很多問題。本文主要講特氣站房的分類。
2019-02-22
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